フライカットによる単結晶ZnSの微細溝加工

三ツ井 健司; 岡田 則夫; 常田 佐久; 増田 忠志; 鳥居 龍晴; 立花 健二; 松下 幸司; 平原 靖大; 青山 正樹; 近藤 聖彦; 鈴井 光一; 小林 尚人

doi:10.11522/pscjspe.2010S.0.15.0

2010 JSPE Autumn (Spring) Conference

Session ID : A14

DOI https://doi.org/10.11522/pscjspe.2010S.0.15.0

Conference information

Host: The Japan Society for Precision Engineering

Fabrication of crystalline ZnS micro grooves by fly cutting

*Kenji Mitsui, Norio Okada, Saku Tsuneta, Tadashi Masuda, Tatsuharu Torii, Kenji Tachibana, Kouji Matsushita, Yasuhiro Hirahara, Masaki Aoyama, Takuhiko Kondo, Mitsukazu Suzui, Naoto Kobayashi

Author information

Keywords: micro-cutting, Ultra-precision cutting, Functionality materials

CONFERENCE PROCEEDINGS FREE ACCESS

Details

Abstract

Owing to high transparency for infrared region, Zinc Sulfide (ZnS) is used for arious infrared optical components. Crystalline ZnS micro grooves were fabricated by fly cutting with a single crystal diamond tool. The orientation is (110) plane, and the cutting direction is 27deg from <110> direction in clockwise. A smooth surface was obtained up to cutting distance of about 3.3m.

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