Precision polishing Technology of single crystal diamond substrate utilizing quartz disk

Proceedings of JSPE Semestrial Meeting

2010 JSPE Autumn (Spring) Conference

Session ID : D36

DOI https://doi.org/10.11522/pscjspe.2010S.0.295.0

Conference information

Host: The Japan Society for Precision Engineering

Precision polishing Technology of single crystal diamond substrate utilizing quartz disk

*Mutsumi Touge, Akihisa Kubota, Satoru Anan, Shogo Wada, Yoshitaka Nakanishi

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Keywords: polishing, single crystal diamond substrate, ultraviolet rays, mirror finished surface

CONFERENCE PROCEEDINGS FREE ACCESS

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Abstract

[in Japanese]

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© 2010 The Japan Society for Precision Engineering

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