Proceedings of JSPE Semestrial Meeting
2010 JSPE Autumn (Spring) Conference
Session ID : F09
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Host: The Japan Society for Precision Engineering

Surface Acoustic Wave Linear Motor Using Segment-Structured Diamond-Like Carbon Films on Contact Surface
6th Report measurement of frictional force
*Mitsuru Nakamura, Hiroyuki Kotani, Masaya Takasaki, Mai Takashima, Naoto Ohtake, Takeshi Mizuno
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Keywords: diamond-like carbon, surface acoustic wave, segment-structured
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[in Japanese]
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© 2010 The Japan Society for Precision Engineering
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