A high-aspect-ratio touch probe using ultrasonic vibration

Abstract

This report describes the improvement of a touch probe which is used in the region of the usual size called macro region. In recent years, manufacturing technologies which can create high-aspect-ratio shapes have advanced. On the other hand, measurements of high-aspect shapes such as deep holes and deep gaps have become difficult. In this report, a high-aspect-ratio touch probe for macro region has been developed with reference to the vibrating touch probe technology that is frequently used in the field of nano and micro region measurements.