Evaluation of Spherical Shape Ultrasonic Transducer with deposited PZT thin film by Hydrothermal Method

Abstract

By using a hydrothermal method, PZT thin film can be easily deposited on the substrate of three-dimensional structure. Therefore PZT thin film is applied to a micro piezoelectric actuator. In this study, PZT thin film has been deposited on a bullet shape titanium substrate 2mm and 10mm in diameter by the hydrothermal method and a ultrasonic transducer was fabricated. In addition, a ultrasonic transducer was evaluated by underwater experiment.