Abstract
The requirement for improving runout error in rotating motion becomes higher and higher according with the recording density improvement. Especially, not only the sensitivity for rotating direction but also the high order of frequency is required in the runout measurement. This study shows that 3 point runout measurement, which is widely used in rotating runout error measurement, has the possibility of omitting some of high order frequency, and proposes a coupled three point method for runout error measurement. An experimental measurement for an air spindle demonstrates the effect of this method.
