Proceedings of JSPE Semestrial Meeting
2012 JSPE Autumn Conference
Session ID : B25
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Host: The Japan Society for Precision Engineering

Active Damping Control of Linear Slider Supported on Squeeze Air Film
*Yuuki Matsumoto, Yuuma Tamaru, Hiroki Shimizu
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Keywords: Squeeze Air Film Support, Piezoelectric Actuator, Linear Slider, Active Damping Control
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[in Japanese]

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© 2012 The Japan Society for Precision Engineering
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