Precision Vertical Fine Stage Using Multilayer Electrostatic Actuator Supported by Lubricating Liquids

Abstract

The authors have studied the multilayer electrostatic actuators supported by only lubricating liquids for ultra-precision fine stages and examined the driving characteristics of the horizontal fine stage with the actuators. The results show that the suitable driving signals can greatly change the friction characteristics and realize the switching function between the low friction characteristics for a wide and fast motion and the high friction characteristics for ultra-precision fine motion with a large locking force. This paper reports the ultra-precision positioning performance using a vertical fine stage with a multilayer electrostatic actuator supported by a lubricating liquid.