Proceedings of JSPE Semestrial Meeting
2012 JSPE Autumn Conference
Session ID : E15
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Host: The Japan Society for Precision Engineering

Atmospheric-Pressure Plasma Oxidation Process for Passivation of Si Surface
*Yuki Kanetani, Yuta Sannomiya, Takahiro Yamada, Hiromasa Ohmi, Hiroaki Kakiuchi, Kiyoshi Yasutake
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Keywords: Atmospheric-Pressure, Plasma, Oxidation
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[in Japanese]
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© 2012 The Japan Society for Precision Engineering
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