Proceedings of JSPE Semestrial Meeting
2012 JSPE Autumn Conference
Session ID : A26
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Host: The Japan Society for Precision Engineering

Nanometer-Scale Vibration Canceller for Ultra Precision Positioning Stage
*Motohiro Takahashi, Hironori Ogawa, Masaki Odai, Masaki Mizuochi
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Keywords: positioning, vibration, ultra precision, stage, nanometer
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[in Japanese]
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© 2012 The Japan Society for Precision Engineering
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