Abstract
Ellipsoidal mirror is one of promising soft X-ray focusing optics which has many advantages such as no chromatic aberration and long focal length. Wavelength of soft X-ray is in single nanometer order, so that tolerances in figure error and alignment error are very high. This paper reports the effect of such errors on focusing properties in soft X-ray focusing, by using various wave-optical simulations. The simulations reveal the tolerances numerically. The required accuracies in figure error or alignment for ideal performances will play important role for developing the fabrication system and the alignment unit for the ellipsoidal soft X-ray focusing mirror.
