Abstract
A three dimensional molecular dynamics (MD) model combined with a finite element method (FEM) is proposed for the analyses of micromachining process. In the connecting area of the model, the displacement of a node in FEM model is given by the average displacement of atoms around the node in MD model. On the other hand, the force generated at a node in FEM model is divided among the atoms around the node in MD model. In this work, for continuous connection of force and displacement between two models, the size of connection area and proper number of atoms participating the connection are investigated.