Proceedings of JSPE Semestrial Meeting
2012 JSPE Autumn Conference
Session ID : F25
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Host: The Japan Society for Precision Engineering

Development of the polishing technique for single-crystal diamond substrate
*Shuya Motoyama, Akihisa Kubota, Mutumi Touge
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Keywords: single-crystal diamond
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[in Japanese]
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© 2012 The Japan Society for Precision Engineering
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