Proceedings of JSPE Semestrial Meeting
2012 JSPE Autumn Conference
Session ID : I19
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Host: The Japan Society for Precision Engineering

High-precision 3D-shape measurement using interferograms exposured under vertical vibration
*Masaaki Adachi, Tatsuyo Sabuta, Yasuto Niwa
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Keywords: optical interferometer, shape measurement, vibration, phase extraction, high-precision measurement
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[in Japanese]
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© 2012 The Japan Society for Precision Engineering
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