Superconducting tungsten nanowire growth by focused-ion-beam chemical vapor deposition

Abstract

In this study, the superconducting nanowire growth by focused-ion-beam chemical vapor deposition was investigated in order to achieve the three-dimensional superconducting nanodevice fabrication. As a result, we demonstrated the superconducting nanowire growth by FIB-CVD using precursor of phenanthrene (C14H10) mixing tungsten hexacarbonyl (W(CO)6). Low temperature electrical properties of tungsten-containing carbon nanowires fabricated by FIB-CVD will be reported in details.