Effects of Ultrasonic Vibration on Micro Drilling into SiC

Abstract

This paper deals with the fabrication of micro PCD drills with a nominal diameter of 300 μm and their application. The fabricated drills were used in the drilling into SiC. In the drilling test, characteristics of the drilling and effects of ultrasonic vibration were investigated. Differences of drilling accuracy under the conditions of with and without ultrasonic vibration were not clear but there were differences of tool wear.