Proceedings of JSPE Semestrial Meeting
2012 JSPE Autumn Conference
Session ID : N32
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Host: The Japan Society for Precision Engineering

[title in Japanese]
*Makoto Ito, Keisuke Nakae, Ryohei Hanayama, Yohan Kondo, Kenichi Hibino
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Keywords: Fizeau interferometer, Sphericity, Phase measurement, Phase shift, Phase shift algorithm
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[in Japanese]
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© 2012 The Japan Society for Precision Engineering
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