Proceedings of JSPE Semestrial Meeting
2012 JSPE Autumn Conference
Session ID : N35
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Host: The Japan Society for Precision Engineering

Nanometer Profile Measurement of Large Aspheric Surface(7th Report)
Measurement of Aspheric Mirror with Autocollimator Measuring Wide Range
*Kyohei Ishikawa, Tomohiko Takamura, Muzheng Xiao, Satoru Takahashi, Kiyoshi Takamasu
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Keywords: Large aspheric surface, Scanning deflectmetry, autocollimator
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[in Japanese]
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© 2012 The Japan Society for Precision Engineering
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