Proceedings of JSPE Semestrial Meeting
2012 JSPE Autumn Conference
Session ID : O35
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Host: The Japan Society for Precision Engineering

[title in Japanese]
*Shuya Takasaki, Yasunori Tashiro, Toshiaki Atari, Masaaki Matsuo, Yasuhiko Tsubota, Atsushi Furuta, Masato Takata, Takahiro Ito
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Keywords: MEMS, micro molding, polishing technology
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[in Japanese]
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© 2012 The Japan Society for Precision Engineering
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