Proceedings of JSPE Semestrial Meeting
2012 JSPE Spring Conference
Session ID : N32
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Host: The Japan Society for Precision Engineering

Application of Rotary Diffracting Gratings Fabricated by Nano-imprint Technology
*Toshihiro Takeshita, Hiroaki Ogino, Kazuyoshi Akase, Eiji Higurashi, Renshi Sawada
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Keywords: nano-imprint, rotary diffracting grating, micro encoder
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[in Japanese]
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© 2012 The Japan Society for Precision Engineering
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