Proceedings of JSPE Semestrial Meeting
2012 JSPE Spring Conference
Session ID : O08
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Host: The Japan Society for Precision Engineering

Micro manipulation system in SEM (2nd report) -Evaluation of micro manipulator and micro manipulation in SEM-
*Youhei Itami, Shinnosuke Hirata, Hisayuki Aoyama
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Keywords: piezoelectric actuator, scanning electron microscope
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[in Japanese]
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© 2012 The Japan Society for Precision Engineering
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