Proceedings of JSPE Semestrial Meeting
2012 JSPE Spring Conference
Session ID : O14
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Host: The Japan Society for Precision Engineering

Delta-Type Miniature Robot Using Levitation Mechanism
*Mitsuhiro Nishio, Akihiro Torii, Akiteru Ueda
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Keywords: Piezoelectric element, Squeeze film effect
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[in Japanese]
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© 2012 The Japan Society for Precision Engineering
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