Proceedings of JSPE Semestrial Meeting
2012 JSPE Spring Conference
Session ID : O16
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Host: The Japan Society for Precision Engineering

Design of High functional ring type PZT for micropump by using FEM Dynamic-piezoelectric-analysis.
*Eiichi Aizawa, Kazuyoshi Tsuchiya, Yasutomo Uetsuji
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Keywords: Tube type micropump, Ring type PZT, FEM analysis, Trench shape, Damping, Deformation amount
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[in Japanese]
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© 2012 The Japan Society for Precision Engineering
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