Reflectivity improvement using PtC/C multilayers for hard X-ray mirrors

Abstract

We present a study of improvement in x-ray reflectivity of platinum/carbon multilayers for x-ray mirrors. The x-ray reflectivity of multilayers is totally dependent on the interface quality. In order to reduce interface roughness induced by a crystallization during the deposition, carbon doping into the platinum layer was proposed, and its effectivity was evaluated. Platinum/carbon and carbon-doped platinum/carbon multilayers were deposited on a silicon (100) substrate by the DC magnetron sputtering deposition. X-ray reflectivity of the multilayers was measured by a grazing incidence x-ray reflectometry with copper K_α source. We concluded that the reflectivity increases with increase of carbon conentration and that the improvement of the reflectivity with about 10 % could be expected.