Proceedings of JSPE Semestrial Meeting
2012 JSPE Spring Conference
Session ID : O44
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Host: The Japan Society for Precision Engineering

Smoothing of single crystal diamond substrate by catalyst assisted polishing
*Akihisa Kubota, Mutsumi Touge
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Keywords: diamond, Planarization
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[in Japanese]
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© 2012 The Japan Society for Precision Engineering
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