2012 JSPE Spring Conference
Session ID : C08
Conference information
Host: The Japan Society for Precision Engineering
Electric Field Effect Study on Polishing Property of CeO2 Particle via Computational Simulation
*Nobuki Ozawa, Kentaro Kawaguchi, Muneyuki Ishikawa, Miho Nakamura, Yuji Higuchi, Momoji Kubo
Author information
Keywords:
Chemical mechanical polishing,
computational simulation,
cerium oxide,
molecular dynamics,
first principles calculation
Details
