2012 JSPE Spring Conference
Session ID : C15
Conference information
Host: The Japan Society for Precision Engineering
Quantum Chemical Molecular Dynamics Simulations on Chemical Mechanical Polishing Processes of Cu Wiring
*Kentaro Kawaguchi, Muneyuki Ishikawa, Yuji Higuchi, Nobuki Ozawa, Tomomi Shimazaki, Momoji Kubo
Author information
Keywords:
polishing
Details
