Abstract
Recently, the nanoscale positioning of table is frequently required for industrial applications and there have been developed many positioning methods. However, there are still left a lot of problems to be investigated related to dynamic range, accuracy fluctuating by thermal expansion, physical vibration and so on. Under the situation, high precision positioning has been often tried successfully utilizing the friction property between contact surfaces because the principle is very simple. In this study, utilizing and the tangential micro-displacement characteristics including the friction property, a basic idea is proposed for developing the positioning system.
