Abstract
When multilayer electrostatic actuators are supported by only lubrication oil, the friction characteristics of the actuators are greatly influenced by their driving signals. The features of actuators enable the actuators to have two driving characteristics, that is, high response with a wide working range under the low friction condition and precise motion with a large holding force but a short working rage under the large friction condition, without additional mechanisms. This paper describes the driving signals for switching these characteristics and ultra-precision positioning performance using the driving signals.
