Proceedings of JSPE Semestrial Meeting
2012 JSPE Spring Conference
Session ID : D19
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Host: The Japan Society for Precision Engineering

Improvement of Finishing Efficiency Considering Contact Behavior of Polishing Pad with Workpiece Surface
*Tatsuya Naito, Motoki Sato, Urara Satake, Tatsuya Sugihara, Toshiyuki Enomoto
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Keywords: Polishing, Polishing Pad, Glass Disk, Finishing Efficiency
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[in Japanese]
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© 2012 The Japan Society for Precision Engineering
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