Proceedings of JSPE Semestrial Meeting
2012 JSPE Spring Conference
Session ID : D33
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Host: The Japan Society for Precision Engineering

Fundamental Study on Manufacturing of Micro 3-D Structure by Ultrasonically Assisted Precision Grinding
*Masakazu Fujimoto, Yongbo Wu, Hidenari Kanai, Masahiko Jin
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Keywords: Ultrasonic vibration, Precision grinding, Micro 3-D structure
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[in Japanese]
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© 2012 The Japan Society for Precision Engineering
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