Effects of process parameters on metallic nano-dot array formation by thermal dewetting method

Abstract

In this paper, a new fabrication process of an ordered nano-dot array is studied. In this process, firstly, a substrate is coated with a thin metal layer. Then, lattice grooves were fabricated on the metal layer by the Nano Plastic Forming method. Finally, the substrate is annealed to induce dewetting into a nano-dot array. Effects of process parameters, such as combination of substrate and metal, annealing conditions, on nano dot array formation are studied experimentally.