2012 JSPE Spring Conference
Session ID : E18
Conference information
Host: The Japan Society for Precision Engineering
[title in Japanese]
*Yuki Kanetani, Kazuma Goto, Yuta Sannomiya, Sawatou Taku, Takahiro Yamada, Hiromasa Ohmi, Hiroaki Kakiuchi, Kiyoshi Yasutake
Author information
Keywords:
atmosphere pressure,
plasma,
chemical vapor deposition,
monocrystalline silicon,
polysilicon,
epitaxial grown
Details
