Random error accumulation in profile shape measurement for large object

Abstract

Profile shape measurements based on multi-probe method and stitching have been investigated in order to realize precise shape measurement for large objects. These methods derive profiles from multiple measurements and it consequently expands error in the derived profiles because of accumulation of the random error induced in the measurements. The errors are estimated using our error propagating models and evaluated by comparison between the experimental values for estimating their applicability for larger objects.