Proceedings of JSPE Semestrial Meeting
2012 JSPE Spring Conference
Session ID : F36
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Engineering applications of a passive THz near-field microscope
*Yusuke KajiharaTakehiro MizutaniSusumu Komiyama
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Abstract
Our passive THz near-field microscope probes spontaneous evanescent waves (wavelength: 15 micrometers) with 60 nm resolution without any external illumination. The main signal origin is the localized thermal energies and the microscope thus can be applied to engineering fields as well as basic physics. Here we share some experimental results like localized thermal distributions on an integrated circuit for engineering applications.
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© 2012 The Japan Society for Precision Engineering
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