2012 JSPE Spring Conference
Session ID : F38
Conference information
Host: The Japan Society for Precision Engineering
Development of multi-cantilever using MEMS technology for scanning profile measurement with multi-point method. (2nd Report)
Basic design and prototype of the multi-cantilever device
Keywords:
scanning profile measurement,
multi-probe method,
three-point method,
motion error,
micro electro mechanical systems
Details
