Proceedings of JSPE Semestrial Meeting
2012 JSPE Spring Conference
Session ID : I16
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Host: The Japan Society for Precision Engineering

Precision Die Using MEMS Process
*Syuuya Takasaki, Takahiro Ito, Yasunori Tashiro, Masaaki Matsuo, Yasuhiko Tsubota, Atsushi Furuta, Masato Takata
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Keywords: MEMS, molds
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[in Japanese]
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© 2012 The Japan Society for Precision Engineering
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