Proceedings of JSPE Semestrial Meeting
2015 JSPE Autumn Conference
Session ID : D15
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Host: The Japan Society for Precision Engineering

Numerical simulation technology for optical evaluation of mid-spatial frequency waviness on ground surface
*Shin-ya Morita, Yutaka Yamagata, Hirofumi Suzuki
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Keywords: Ultrahigh precision machine tool, aspheric surface, ray tracing, mid-spatial frequency
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[in Japanese]
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© 2015 The Japan Society for Precision Engineering
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