Abstract
Profile measurement of a Fresnel lens is carried out by using a long-stroke atomic force microscope (LS-AFM). A self-oscillation/detection unit consisting of two electrochemically-polished tungsten wires and a tuning fork quartz crystal resonator (TF-QCR) is employed as a measurement probe. The sharp tip of the probe with an effective length of larger than 100 um improves capability of the probe accessing to the valley of a measurement profile with large amplitude and steep slope. A profile measurement result of the LS-AFM is compared with that of a commercially-available optical probe.
