Excitation and Propagation of Surface Plasmon Polariton in Metal-Insulator-Metal Structure with Titanium Nitride Layer

Abstract

Metal-nitride family (TiN,ZrN,HfN,TaN,and etc.) has been suggested as an important class of materials for excitation, propagation, and focusing of surface plasmon polaritions (SPP) in metal-insulator-metal (MIM) structure for plasmonic waveguiding coupled with integrated electronic circuits. In this paper, spectroscopic properties of prototypical MIM structure with TiN thin films are evaluated experimentally and theoretically.