Proceedings of JSPE Semestrial Meeting
2015 JSPE Autumn Conference
Session ID : I64
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Host: The Japan Society for Precision Engineering

[title in Japanese]
*Makoto Yamaguchi, Noritaka Kawasegi, Tomomi Kozu, Noboru Morita, Kazuhito Nishimura
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Keywords: ultraprecision machining, focused ion beam, diamond cutting tool, Raman scattering, damaged layer
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[in Japanese]
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© 2015 The Japan Society for Precision Engineering
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