Abstract
Gaussian filter is one of the typical examples for surface roughness estimation methods of which transmission characteristics are well known. However, if this filter is applied to an open profile without data before and after both ends, the estimated transmission characteristics becomes different from the theoretical values. This phenomenon is a great problem. However, this is due to the method for obtaining the transmission characteristics, not to the data. This paper shows the method for obtaining the certain transmission characteristics of the low-pass filter from discrete Fourier transforms both of the actual measurement data and filter output. And the feasibility of the proposed method was evaluated by comparing the theoretical values.