Proceedings of JSPE Semestrial Meeting
2015 JSPE Spring Conference
Session ID : F63
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Host: The Japan Society for Precision Engineering

[title in Japanese]
*Kentaro Kawaguchi, Yuji Higuchi, Nobuki Ozawa, Momoji Kubo
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Keywords: Gallium Nitride, Chemical Mechanical Polishing, Quantum Chemical Molecular Dynamics Method, First-Principles Calculation
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[in Japanese]
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© 2015 The Japan Society for Precision Engineering
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