Proceedings of JSPE Semestrial Meeting
2015 JSPE Spring Conference
Session ID : F68
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Host: The Japan Society for Precision Engineering

Recycling Simulation of Used CeO2 Abrasive Grain for CMP of Glass Surface based on Molecular Dynamics Method
*Nobuki Ozawa, Zhou Kang, Kentaro Kawaguchi, Yuji Higuchi, Momoji Kubo
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Keywords: Molecular dynamics method, Recycling of abrasive grain, Chemical mechanical polishing, Ceria
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[in Japanese]
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© 2015 The Japan Society for Precision Engineering
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