Proceedings of JSPE Semestrial Meeting
2016 JSPE Autumn Conference
Session ID : D32
Conference information

Host: The Japan Society for Precision Engineering

Name : 2016 JSPE Autumn Conference

Location : [in Japanese]

Date : September 06, 2016 - September 08, 2016

Basic verification of a pattern modification method for automation of capacity-equalized mold design
*Sung-Won Youn, Kenta Suzuki, Hiroshi Hiroshima
Author information
Keywords: Nanoimprint lithography, Mold, Residual layer thickness, Capacity-equalized Mold
CONFERENCE PROCEEDINGS FREE ACCESS

Details
Download PDF (664K)
Download citation RIS

(compatible with EndNote, Reference Manager, ProCite, RefWorks)

BIB TEX

(compatible with BibDesk, LaTeX)

Text
How to download citation
Contact us
Abstract
[in Japanese]
Content from these authors
© 2016 The Japan Society for Precision Engineering
Previous article Next article
Favorites & Alerts

Recently viewed articles
Share this page
feedback
 Top