Conditions for Longer Service Life of Micro Porous Membrane Filter in CMP Slurry Filtration

Abstract

Micro porous membrane filters have been applied to CMP slurry filtration for reducing micro scratches. But short service life by fouling is major issues. This study investigated relationship of large particle count (LPC), abrasive particle concentration with filter service life and found that optimum pre-filtration had significant effect on longer service life by reducing LPC and that combination of lower LPC and lower abrasive particle concentration had further significant effect.