2016 JSPE Autumn Conference
Session ID : E64
Conference information
Host: The Japan Society for Precision Engineering
Name : 2016 JSPE Autumn Conference
Location : [in Japanese]
Date : September 06, 2016 - September 08, 2016
Development of soft X-ray Laminar-type varied-line-spacing gratings using Two-Beam interference
Design of exposure system
Keywords:
grating,
photolithography
Details
