2016 JSPE Autumn Conference
Session ID : N33
Conference information
Host: The Japan Society for Precision Engineering
Name : 2016 JSPE Autumn Conference
Location : [in Japanese]
Date : September 06, 2016 - September 08, 2016
Computational analysis on highly activated abrasive grain applied to GaN CMP
*Takuya Igarashi, Kentaro Kawaguchi, Yusuke Ootani, Takeshi Nishimatsu, Yuji Higuchi, Nobuki Ozawa, Momoji Kubo
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