Abstract
Single crystal Lithium titanate (LiTaO3 or LT) is a typical multi-functional material that the physical properties exhibits extraordinary piezoelectricity and pyroelectricity. It has been utilized in numerous appliances, such as force sensors, thermal sensors and SAW (surface acoustic wave) filter. Due to piezoelectric and pyroelectric properties, LT single crystal undergoes structure phase transition when the temperature are changed. Therefore, its properties may effect on ferroelectric material grinding process that the cracks initiate in wafer and break it. However, detailed summaries of LT physical properties is not readily available yet. Thus, the objective of this study is to demonstrate influence of structure phase transition effect on mechanical property of single crystal Lithium titanate material. Designing a Nano-indentation experiment obtained the relation between K1c and temperature gradient. The theory has the potential to be further extended to LT materials grinding process.
