Proceedings of JSPE Semestrial Meeting
2016 JSPE Autumn Conference
Session ID : O06
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A study on sub-nanometer positioning by using ball screw drive
Experimental discussion on stability under settled condition and positioning resolution
*Shigeo FukadaTakehiko ShimuraHideoki Shimizu
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CONFERENCE PROCEEDINGS FREE ACCESS

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[in Japanese]
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© 2016 The Japan Society for Precision Engineering
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